ConceptNet 5: photolithography tool

Types of photolithography tool

en imager ⁽ⁿ⁾ ➜
en masking reticle ⁽ⁿ⁾ ➜
en stepper photolithography ⁽ⁿ⁾ ➜

photolithography tool is a type of…

en device ⁽ⁿ⁾ ➜
en semiconductor processing tool ⁽ⁿ⁾ ➜

Links to other resources

sw.opencyc.org /2012/05/10/concept/en/Photolithography_tool